完整後設資料紀錄
| DC 欄位 | 值 | 語言 |
|---|---|---|
| dc.contributor.author | 方俊傑 | |
| dc.date | 93學年度 | |
| dc.date | 第二學期 | |
| dc.date.accessioned | 2009-06-03T03:17:50Z | |
| dc.date.accessioned | 2020-05-22T08:30:06Z | - |
| dc.date.available | 2009-06-03T03:17:50Z | |
| dc.date.available | 2020-05-22T08:30:06Z | - |
| dc.date.issued | 2007-11-06T02:01:44Z | |
| dc.identifier.other | d9151300 | |
| dc.identifier.uri | http://dspace.lib.fcu.edu.tw/handle/2377/481 | - |
| dc.description.abstract | 本專題研究報告提出一種改良式的金屬氧化膜熱傳導係數之量測方法，此方法結合自製的薄膜熱傳導量測儀及修定過的熱傳導理論，量測薄膜熱傳導係數。量測的結果顯示，氧化矽(SiO2)、氧化鈦(TiO2)、氧化鋁(Al2O3)、氧化鉭(Ta2O5)及氧化鈮(Nb2O5)等金屬氧化膜的熱傳導係數，其值分別為0.45(W/mK)、0.59(W/mK)、0.38(W/mK)、0.47(W/mK)、0.69(W/mK)，最後將量測數據與相關文獻資料作比較，其誤差值在10%以內。 本專題研究已成功地研發一套薄膜熱傳導係數量測系統，其優點為非破壞性的量測、價格便宜、操作簡便、量測速度快。尤其是系統改善了因接觸面不穩定所造成的誤差，進而提升了量測系統之靈敏度與精確度，這對於金屬氧化膜熱傳導性質的研究上，是極為有用的。 | |
| dc.description.tableofcontents | 摘要.............................................................................................................I 目錄............................................................................................................II 圖目錄......................................................................................................IV 表目錄........................................................................................................V 符號說明..................................................................................................VI 第一章 緒論...............................................................................................1 1-1研究動機.......................................................................................1 1-2研究目的.......................................................................................1 1-3 研究方法......................................................................................2 1-4 論文架構......................................................................................2 第二章 熱傳導基本理論..........................................................................4 2-1 原理............................................................................................4 2-2 熱傳導分析模式........................................................................5 第三章 熱傳導量測技術..........................................................................9 3-1 文獻回顧....................................................................................9 3-1-1 3ω法------------------------------------------------------------9 3-1-2 特徵微結構法-------------------------------------------------11 3-1-3 聲光法---------------------------------------------------------12 3-1-4 熱比較測定法(thermal comparator)-----------------------14 第四章 實驗設備及量測........................................................................20 4-1 蒸鍍系統......................................................................................20 4-1-1 真空系統------------------------------------------------------20 4-1-2 電子槍蒸鍍系統---------------------------------------------21 4-1-3 離子源輔助系統---------------------------------------------21 4-1-4監控系統-------------------------------------------------------21 4-2 實驗架構....................................................................................21 4-2-1實驗量測-------------------------------------------------------22 第五章 結果與討論................................................................................25 5-1 金屬氧化膜熱傳導係數量測結果............................................25 5-2 溫度比例的影響........................................................................28 5-3 接觸面的影響............................................................................28 第六章 結論.............................................................................................31 參考文獻...................................................................................................32 | |
| dc.format.extent | 41 | |
| dc.format.extent | 746850 bytes | |
| dc.format.extent | 1832 bytes | |
| dc.format.mimetype | application/pdf | |
| dc.format.mimetype | text/plain | |
| dc.language | 中文 | |
| dc.language.iso | zh_TW | |
| dc.relation.isbasedon | [1]. C. H. Henager and W. T. Pawlewicz” Thermal conductivities of thin sputtered optical films” Applied optics,Vol. 32, pp.91-100, 1993. [2]. J. C. Lambropoulos, M. R. Jolly, C. A. Amsden, S. E. Gilman,M. J. Sinicropi, D. Diakomihalis, and S. D. Jacobs, "Thermal conductivity of dielectric thin films" Journal of applied physics,Vol.66, pp.4230-4242,1989. [3].H.S.Carslaw and J.C.Jaeger ”Conduction of heat in solids” Oxford U.press,New York, pp.214-216,1947. [4]. J.R.Dryden ”Effect of a surface coating on the constriction resistance of a spot on an infinite half-plane” Transactions of the ASME,Vol.105,pp.408-410,1983. [5]. D.G.Cahill ” Thermal conductivity measurement from 30 to 750 K. The 3ω method “Review of Scientific Instruments , Vol.61, pp.802-808,1990. [6]. G. B. Martin , A .Altes , R. Heiderhoff and L.J.Balk “Quantitative thermal conductivity measurements with nanometre resolution” Journal of Physics D:Applied physics,Vol.32, pp.13-17, 1998. [7]. L. Lu , W. Yi and D. L. Zhang “3ω method for specific heat and thermal conductivity measurements” Review of scientific instruments ,Vol.72,pp.2996-3003, 2001. [8].A. Jacquot, B. Lenoir, A. Dauscher, M. Stolzer and J. Meusel “Numerical simulation of the 3w method for measuringthe thermal conductivity” Journal of applied physics, Vol. 91, pp.4733-4738 ,2002. [9]. A .Altes, R.Heiderhoff and L.J.Balk “Quantitative dynamic near-field microscopy of thermal conductivity”, Journal of Physics D :Applied physics,Vol. 37,pp.952-963, 2004. [10].N.O.Birge, S.R.Nagel ”Wide-frequency specific heat spectrometer” Review of scientific instruments,Vol.58,pp.1464-1470,1987. [11]. S.M.Lee, D.G.Cahill ”Heat transport in thin dielectric films ” Journal of Applied Physics ,Vol. 81, pp.2590-2595,1997. [12]F.Volklein, H.Balles ”A microstructure for measurement of thermal conductivity of polysilicon thin films” Journal of microelectromechanical systems, Vol.1, pp.193-196, 1992. [13].M.B.Kleiner , S.A.Kuhn , W.Weber ”Thermal conductivity measurements of thin silicon dioxide films in integrated circuits” IEEE Transactions On Electron Devices ,Vol.43 , pp.1602-1609,1996. [14].董建立”量測薄膜材料熱傳導係數之簡易方法的研究”國立中興大學精密工程研究所，2000年. [15].M.Rohde "Photoacoustic Characterization of thermal transport properties in thin films and microstructures," Thin solid films, Vol.238, pp.199-206,1994. [16]. S. Govorkov , W. Ruderman , M.W.Horn, R.B.Goodman and M.Rothschild ,“A new method for measuring thermal conductivity”, Review of scientific instruments,Vol. 68 , pp.3828-3834, 1997. [17].X.Wang, H.Hu , and X.Xu ”Photo-acoustic measurement of thermal conductivity of thin films and bulk materials” Journal of heat transfer,Vol.123, pp.138-144, 2001. [18]袁崑益”光學薄膜熱傳導特性量測之研究”國立中央大學碩士論文，2000. [19] K. R. Cheruparambil , B. Farouk1 ,J. E. Yehoda, N. A. Macken ”Thermal conductivity measurement of cvd diamond films using a modified thermal comparator method” Journal of heat transfer, Vol. 122 , pp.808-816, 2000. [20] J. C. Manifacier, J. Gasiot and J. P. Fillard,”A simple method for thedetermination of the optical constants n, k and the thickness of a weekly absorbing thin film” Journl of Physics E, Vol.9 , pp. [21] Z.L.Wu , M.Reichling , X.Q.Hu , K.Balasubranian , and K.H. Guenther “Absorption and thermal conductivity of oxide thin films measured by photothermal displacement and reflection”Applied optics., Vol. 32,pp.5660-5665,1993. [22]. D. Ristau and J. Ebert , “Development of a thermographic laser calorimeter” Applied Optics. ,Vol.25 No.24,pp.4571-4578,1986. [23]H.Guenther and J. K. Mciver “The role of thermal conductivity in the pulsed laser damage sensitivity of optical thin films “ Thin solid films, Vol. 163, pp. 203-214,1988. | |
| dc.subject | 熱傳導 | |
| dc.subject | 金屬氧化膜 | |
| dc.subject | 熱比較測定法 | |
| dc.title | 金屬氧化膜熱傳導係數量測之研究 | |
| dc.title | Study on the thermal conductivity measurements of metal oxide films | |
| dc.type | 大學生學期報告 | |
| dc.description.course | 薄膜光學 | |
| dc.contributor.department | 電機工程學系,資訊電機學院 | |
| dc.description.instructor | 田春林 | |
| 分類: | 資電093學年度 | |
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